Precision Specialized Parts
Nano-level precision defines process perfection.
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End Effector
| Dimension |
200(W) X 205(D) X 3.5(H) mm |
| Wafer size |
300mm Wafer |
| Permissible Load |
600g |
| Body |
Material : CERAMIC |
| Warpage |
+- 2.5mm |
| Surface Resistance |
10^6~10^9 |
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CMP Clamp
| By using elastic plastic material, the nut locking force causes the plastic to expand laterally, effectively preventing loosening. Its performance is excellent when used in Chemical Mechanical Polishing (CMP) processes. The circular structure ensures both stable contact and rotation prevention.
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Helium Gas Cylinder Cart
To prevent serious injuries that could occur in the event of a collision with sharp edges, a cushion bar has been installed to absorb impact and reduce the risk of accidents. Additionally, the safety bar is designed for easy attachment and detachment, making gas cylinder replacement simple and convenient.
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Helium Gun for Leak Test
| This portable, cost-efficient vacuum inspection test gun is designed to detect leaks in semiconductor equipment piping—such as vacuum chambers, vacuum equipment, or pipelines—by working together with a detector. It enables precise micro-amount injection of helium without unnecessary waste, significantly reducing the consumption of helium, which is a limited resource. It features precise and fine adjustment of helium flow, ensuring highly controlled micro-amount helium dispensing.
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